Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5843236 | Plasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamber | Hiroyuki Yoshiki, Kazuki Kondo, Akira Ishii, Shigeki Amadatsu, Koji Itadani +1 more | 1998-12-01 |