| 12191117 |
Compact low angle ion beam extraction assembly and processing apparatus |
Costel Biloiu, Solomon Belangedi Basame, Kevin Anglin, Tyler Rockwell |
2025-01-07 |
| 12106943 |
Substrate halo arrangement for improved process uniformity |
Simon Ruffell, Kevin Anglin, Tyler Rockwell, Christopher Campbell, Kevin M. Daniels +2 more |
2024-10-01 |
| 11948781 |
Apparatus and system including high angle extraction optics |
Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Kevin M. Daniels, Kevin T. Ryan +3 more |
2024-04-02 |
| 11495430 |
Tunable extraction assembly for wide angle ion beam |
Costel Biloiu, Kevin M. Daniels |
2022-11-08 |
| 11361935 |
Apparatus and system including high angle extraction optics |
Costel Biloiu, Kevin M. Daniels, Frank Sinclair, Christopher Campbell |
2022-06-14 |
| 10062548 |
Gas injection system for ion beam device |
Ernest E. Allen, Richard J. Hertel, Kevin M. Daniels, Glen Gilchrist |
2018-08-28 |
| 9865433 |
Gas injection system for ion beam device |
Ernest E. Allen, Richard J. Hertel, Alexander C. Kontos, Shurong Liang, Jeffrey E. Krampert +1 more |
2018-01-09 |
| 8791430 |
Scanner for GCIB system |
Matthew C. Gwinn, Avrum Freytsis |
2014-07-29 |
| 8409399 |
Reduced maintenance chemical oxide removal (COR) processing system |
Arthur Laflamme, Thomas Hamelin |
2013-04-02 |
| 8323410 |
High throughput chemical treatment system and method of operating |
Hiroyuki Takahashi |
2012-12-04 |
| 8303716 |
High throughput processing system for chemical treatment and thermal treatment and method of operating |
Thomas Hamelin |
2012-11-06 |
| 8287688 |
Substrate support for high throughput chemical treatment system |
Hiroyuki Takahashi |
2012-10-16 |
| 8115140 |
Heater assembly for high throughput chemical treatment system |
Charles R. Launsby |
2012-02-14 |
| 7964058 |
Processing system and method for chemically treating a substrate |
Thomas Hamelin, Arthur Laflamme |
2011-06-21 |
| 7651583 |
Processing system and method for treating a substrate |
Martin Kent, Arthur Laflamme, Thomas Hamelin |
2010-01-26 |
| 7462243 |
Chemical processing system and method |
Arthur Laflamme, Eric J. Strang |
2008-12-09 |
| 7462564 |
Processing system and method for treating a substrate |
Thomas Hamelin, Arthur Laflamme |
2008-12-09 |
| 7461614 |
Method and apparatus for improved baffle plate |
Steven Fink, Eric J. Strang, Arthur Laflamme, Sandra Hyland |
2008-12-09 |
| 7214274 |
Method and apparatus for thermally insulating adjacent temperature controlled processing chambers |
Thomas Hamelin |
2007-05-08 |
| 7083161 |
Method and apparatus for providing vacuum isolation |
— |
2006-08-01 |
| 7079760 |
Processing system and method for thermally treating a substrate |
Thomas Hamelin, Arthur Laflamme |
2006-07-18 |
| 7029536 |
Processing system and method for treating a substrate |
Thomas Hamelin, Arthur Laflamme |
2006-04-18 |
| 6951821 |
Processing system and method for chemically treating a substrate |
Thomas Hamelin, Arthur Laflamme |
2005-10-04 |
| 6695318 |
Electronic device processing equipment having contact gasket between chamber parts |
Stephen N. Golovato, Arthur Laflamme |
2004-02-24 |
| 6558506 |
Etching system and etching chamber |
Richard J. Freeman, Yoichi Kurono, Arthur Laflamme, Louise S. Barriss, Tadashi Onishi |
2003-05-06 |
