Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255345 | Method for growing germanium/silicon—germanium superlattice | Vu A. Vu, Robert L. Kamocsai, Daniel O'Donnell, Andrew T. S. Pomerene | 2016-02-09 |
| 8580075 | Method and system for introduction of an active material to a chemical process | John A. Hughes, Ralph Kim | 2013-11-12 |
| 7883835 | Method for double patterning a thin film | Shannon W. Dunn | 2011-02-08 |
| 7811747 | Method of patterning an anti-reflective coating by partial developing | Shannon W. Dunn | 2010-10-12 |
| 7723237 | Method for selective removal of damaged multi-stack bilayer films | Ian J. Brown, Yannick Feurprier | 2010-05-25 |
| 7461614 | Method and apparatus for improved baffle plate | Steven Fink, Eric J. Strang, Arthur Laflamme, Jay Wallace | 2008-12-09 |
| 7432191 | Method of forming a dual damascene structure utilizing a developable anti-reflective coating | Harlan Stamper, Shannon W. Dunn | 2008-10-07 |
| 7226868 | Method of etching high aspect ratio features | Aelan Mosden, Minori Kajimoto | 2007-06-05 |
| 6376262 | Method of forming a semiconductor device using double endpoint detection | Danielle Ki'ilani Kempa | 2002-04-23 |