Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580075 | Method and system for introduction of an active material to a chemical process | John A. Hughes, Sandra Hyland | 2013-11-12 |
| 7465673 | Method and apparatus for bilayer photoresist dry development | Yoshiki Igarashi, Kouichiro Inazawa, Kimihiro Higuchi, Vaidyanathan Balasubramaniam, Eiichi Nishimura +2 more | 2008-12-16 |