Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728381 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kaoru Oohashi +3 more | 2017-08-08 |
| 9437402 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kaoru Oohashi +3 more | 2016-09-06 |
| 8904957 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kaoru Oohashi +3 more | 2014-12-09 |
| 8387562 | Plasma processor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kaoru Oohashi +3 more | 2013-03-05 |
| 8343372 | Surface processing method for mounting stage | Tadashi Aoto, Eiichiro Kikuchi, Masakazu Higuma | 2013-01-01 |
| 8287750 | Plasma processing method and plasma processing apparatus | Toshihiko Shindo, Shin Okamoto | 2012-10-16 |
| 8056503 | Plasma procesor and plasma processing method | Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Yuichiro Sakamoto, Kaoru Oohashi +3 more | 2011-11-15 |
| 7799238 | Plasma processing method and plasma processing apparatus | Toshihiko Shindo, Shin Okamoto | 2010-09-21 |
| 7713431 | Plasma processing method | Tomoaki Ukei, Tatsuo Matsudo, Kazuki Denpoh | 2010-05-11 |
| 7541283 | Plasma processing method and plasma processing apparatus | Toshihiko Shindo, Shin Okamoto | 2009-06-02 |
| 7465673 | Method and apparatus for bilayer photoresist dry development | Yoshiki Igarashi, Kouichiro Inazawa, Vaidyanathan Balasubramaniam, Eiichi Nishimura, Ralph Kim +2 more | 2008-12-16 |
| 7335278 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Hiroyuki Ishihara, Koji Maruyama | 2008-02-26 |
| 6676804 | Method and apparatus for plasma processing | Chishio Koshimizu, Hiroyuki Ishihara, Koji Maruyama | 2004-01-13 |
| 5980767 | Method and devices for detecting the end point of plasma process | Chishio Koshimizu | 1999-11-09 |
| 5783492 | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Chishio Koshimizu, Ryoichiro Koshi, Teruo Iwata, Nobuo Ishii | 1998-07-21 |