Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9780037 | Method of processing target object | Kazuya Kato, Ryuichi Asako, Hiroshi Nagahata | 2017-10-03 |
| 8287750 | Plasma processing method and plasma processing apparatus | Shin Okamoto, Kimihiro Higuchi | 2012-10-16 |
| 8263498 | Semiconductor device fabricating method, plasma processing system and storage medium | Ryukichi Shimizu, Akihiro Kikuchi | 2012-09-11 |
| 7951513 | Pellicle and method for producing pellicle | Yoshihiro Kubota, Shoji Akiyama | 2011-05-31 |
| 7919217 | Pellicle and method for producing pellicle | Yoshihiro Kubota, Shoji Akiyama | 2011-04-05 |
| 7799238 | Plasma processing method and plasma processing apparatus | Shin Okamoto, Kimihiro Higuchi | 2010-09-21 |
| 7541283 | Plasma processing method and plasma processing apparatus | Shin Okamoto, Kimihiro Higuchi | 2009-06-02 |
| 5663865 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Ryoji Nakajima, Takaaki Nagao | 1997-09-02 |