Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288678 | Substrate processing apparatus and substrate transfer position adjustment method | Joji TAKAYOSHI, Hidehiko Sato, Yuri Kimura | 2025-04-29 |
| 12170193 | Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation program | Yuki KATAOKA | 2024-12-17 |
| 11669079 | Tool health monitoring and classifications with virtual metrology and incoming wafer monitoring enhancements | Jun Shinagawa, Toshihiro KITAO, Chungjong Lee | 2023-06-06 |
| 10832891 | Plasma processing apparatus and plasma processing method | Ryota Sakane, Hideyuki Kobayashi, Jungwoo Na | 2020-11-10 |
| 10676823 | Processing method and processing apparatus | Ryota Sakane, Takashi Kitazawa, Hideyuki Kobayashi, Koji Yamagishi | 2020-06-09 |
| 9780037 | Method of processing target object | Kazuya Kato, Toshihiko Shindo, Ryuichi Asako | 2017-10-03 |
| 9396911 | Determination method, control method, determination apparatus, pattern forming system and program | Keisuke Tanaka, Kazuo Sawai | 2016-07-19 |
| 8058585 | Plasma processing method, plasma processing apparatus and storage medium | Hiroki Amemiya, Akihito Toda | 2011-11-15 |