Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347658 | Stage and plasma processing apparatus | — | 2025-07-01 |
| 11242930 | Seal structure and seal method | — | 2022-02-08 |
| 11170991 | Plasma processing apparatus | — | 2021-11-09 |
| 10832891 | Plasma processing apparatus and plasma processing method | Hideyuki Kobayashi, Hiroshi Nagahata, Jungwoo Na | 2020-11-10 |
| 10676823 | Processing method and processing apparatus | Takashi Kitazawa, Hiroshi Nagahata, Hideyuki Kobayashi, Koji Yamagishi | 2020-06-09 |
| 10374358 | Feeder-cover structure and semiconductor production apparatus | Dai KITAGAWA | 2019-08-06 |
| 9991100 | Plasma processing apparatus and control method | — | 2018-06-05 |