Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756807 | Power feeding mechanism and method for controlling temperature of a stage | — | 2023-09-12 |
| 11756806 | Heater power feeding mechanism | Katsuyuki Koizumi | 2023-09-12 |
| 11743973 | Placing table and plasma processing apparatus | — | 2023-08-29 |
| 11705302 | Substrate support and plasma processing apparatus | — | 2023-07-18 |
| 11373884 | Placing table and plasma treatment apparatus | Katsuyuki Koizumi, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2022-06-28 |
| 11121009 | Power feeding mechanism and method for controlling temperature of a stage | — | 2021-09-14 |
| 10679869 | Placing table and plasma treatment apparatus | Katsuyuki Koizumi, Tsutomu Nagai, Daisuke Hayashi, Satoru TERUUCHI | 2020-06-09 |
| 10593522 | Electrostatic chuck, placing table and plasma processing apparatus | Katsuyuki Koizumi, Tomoyuki Takahashi | 2020-03-17 |
| 10512125 | Mounting table and substrate processing apparatus | — | 2019-12-17 |
| 10374358 | Feeder-cover structure and semiconductor production apparatus | Ryota Sakane | 2019-08-06 |
| 10199246 | Temperature control mechanism, temperature control method and substrate processing apparatus | Katsuyuki Koizumi, Shigeru Senzaki, Tomoyuki Takahashi | 2019-02-05 |
| 9209043 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Tomohiro Okumura | 2015-12-08 |