Issued Patents All Time
Showing 1–25 of 111 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11522486 | Temperature estimation device, motor control device, and temperature estimation method | Yoshitaka Ikitake, Ryoichi Ishihara, Yuki Minakuchi, Daishi Iwasa | 2022-12-06 |
| 10804122 | Substrate heating apparatus, substrate heating method and method of manufacturing electronic device | Masahiro Yamamoto | 2020-10-13 |
| 10229814 | Plasma processing apparatus | Hiroshi Kawaura, Tetsuya Yukimoto | 2019-03-12 |
| 10181406 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2019-01-15 |
| 10147585 | Plasma processing apparatus | Hiroshi Kawaura, Tetsuya Yukimoto | 2018-12-04 |
| 10141162 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2018-11-27 |
| 10115565 | Plasma processing apparatus and plasma processing method | Ichiro Nakayama | 2018-10-30 |
| 9978593 | Plasma processing device, plasma processing method and manufacturing method of electronic device | — | 2018-05-22 |
| 9885115 | Plasma treatment apparatus and plasma treatment method | — | 2018-02-06 |
| 9799495 | Plasma processing apparatus and plasma processing method | Shogo Okita, Bunji Miizuno | 2017-10-24 |
| 9741538 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Satoshi SUEMASU | 2017-08-22 |
| 9691593 | Plasma processing device and plasma processing method | — | 2017-06-27 |
| 9673062 | Plasma processing method | — | 2017-06-06 |
| 9627183 | Plasma processing device, plasma processing method and method of manufacturing electronic devices | — | 2017-04-18 |
| 9601330 | Plasma processing device, and plasma processing method | Hiroshi Kawaura | 2017-03-21 |
| 9595458 | Plasma processing apparatus and method, and method of manufacturing electronic device | Satoshi SUEMASU | 2017-03-14 |
| 9583313 | Plasma processing apparatus and plasma processing method | — | 2017-02-28 |
| 9502220 | Plasma processing apparatus and plasma processing method | Shogo Okita, Bunji Mizuno | 2016-11-22 |
| 9343269 | Plasma processing apparatus | Hiroshi Kawaura | 2016-05-17 |
| 9209043 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Dai KITAGAWA | 2015-12-08 |
| 9105803 | Polycrystalline-type solar cell panel and process for production thereof | Ichiro Nakayama, Hitoshi Yamanishi, Yoshihisa Ohido, Nobuyuki Kamikihara | 2015-08-11 |
| 8889155 | Gel composition for treating mycosis | Akiko Ochiai, Keizo Sakuda, Yoshiyuki Tatsumi | 2014-11-18 |
| 8853523 | Solar cell module and manufacturing method of the same | Michiru Kuromiya, SHUZO TSUCHIDA | 2014-10-07 |
| 8802567 | Plasma processing method | Ichiro Nakayama, Hiroshi Kawaura, Tetsuya Yukimoto | 2014-08-12 |
| 8772067 | Silicon substrate having textured surface, solar cell having same, and method for producing same | Ichiro Nakayama, Tsuyoshi Nomura, Mitsuo Saitoh, Hiroshi Tanabe, Yukiya Usui | 2014-07-08 |