Issued Patents All Time
Showing 1–25 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340976 | Plasma processing apparatus | Naoaki Takeda, Seiya NAGANO, Toshihiro Wada, Takahiro MIYAI | 2025-06-24 |
| 12300482 | Element chip manufacturing method and substrate processing method | Hidehiko Karasaki | 2025-05-13 |
| 12230484 | Plasma processing apparatus and plasma processing method | Atsushi Harikai | 2025-02-18 |
| 12230541 | Element chip manufacturing method | Atsushi Harikai, Akihiro Itou, Toshiyuki TAKASAKI | 2025-02-18 |
| 12205823 | Method for producing element chips | Toshiyuki TAKASAKI, Ryota Furukawa, Atsushi Harikai | 2025-01-21 |
| 12165845 | Plasma processing apparatus and method for using plasma processing apparatus | Yoshiyuki Wada, Takahiro MIYAI, Naoaki Takeda, Toshihiro Wada, Toshiyuki TAKASAKI | 2024-12-10 |
| 11830758 | Plasma processing method | Atsushi Harikai, Akihiro Itou | 2023-11-28 |
| 11817323 | Etching method and element chip manufacturing method | Atsushi Harikai, Akihiro Itou | 2023-11-14 |
| 11688641 | Element chip isolation method using laser grooving and plasma etching | Hidefumi SAEKI, Hidehiko Karasaki, Atsushi Harikai, Akihiro Itou | 2023-06-27 |
| 11682575 | Plasma processing apparatus, plasma processing method, and element chip manufacturing method | Atsushi Harikai | 2023-06-20 |
| 11551974 | Manufacturing process of element chip using laser grooving and plasma-etching | Hidefumi SAEKI, Atsushi Harikai | 2023-01-10 |
| 11398372 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Noriyuki Matsubara, Mitsuru Hiroshima, Toshihiro Wada | 2022-07-26 |
| 11361944 | Plasma processing method, and element chip manufacturing method | Atsushi Harikai | 2022-06-14 |
| 11355323 | Plasma processing apparatus and method therefor | — | 2022-06-07 |
| 11335564 | Element chip smoothing method and element chip manufacturing method | Akihiro Itou, Atsushi Harikai, Toshiyuki TAKASAKI | 2022-05-17 |
| 11289428 | Element chip manufacturing method | Kiyoshi Arita, Hidehiko Karasaki | 2022-03-29 |
| 11219929 | Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing method | Akihiro Itou, Atsushi Harikai, Toshiyuki TAKASAKI, Hidefumi SAEKI | 2022-01-11 |
| 11189480 | Element chip manufacturing method | Atsushi Harikai, Akihiro Itou | 2021-11-30 |
| 11145494 | Plasma processing apparatus | Mitsuhiro Okune | 2021-10-12 |
| 11145548 | Manufacturing process of element chip using laser grooving and plasma-etching | Hidefumi SAEKI, Atsushi Harikai | 2021-10-12 |
| 11101112 | Plasma processing device and plasma processing method | — | 2021-08-24 |
| 10964597 | Element chip manufacturing method | Atsushi Harikai, Noriyuki Matsubara, Hidefumi SAEKI, Akihiro Itou | 2021-03-30 |
| 10923357 | Element chip and manufacturing process thereof | Akihiro Itou, Atsushi Harikai, Noriyuki Matsubara | 2021-02-16 |
| 10923362 | Manufacturing process of element chip | Atsushi Harikai, Noriyuki Matsubara, Hidehiko Karasaki | 2021-02-16 |
| 10896849 | Method of dicing a semiconductor wafer using a protective film formed by coating a mixture of water-soluble resin and organic solvent | Hidehiko Karasaki, Noriyuki Matsubara, Hidefumi SAEKI | 2021-01-19 |