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Plasma processing apparatus and plasma processing method |
Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Noriyuki Matsubara, Toshihiro Wada |
2022-07-26 |
| 10497622 |
Element chip manufacturing method |
Shogo Okita, Atsushi Harikai, Noriyuki Matsubara, Akihiro Itou |
2019-12-03 |
| 10475704 |
Method of manufacturing element chip and element chip |
Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune |
2019-11-12 |
| 10236266 |
Element chip manufacturing method |
Atsushi Harikai, Shogo Okita, Akihiro Itou, Katsumi Takano |
2019-03-19 |
| 10177063 |
Element chip and method for manufacturing the same |
Bunzi Mizuno, Shogo Okita, Noriyuki Matsubara, Atsushi Harikai |
2019-01-08 |
| 10049933 |
Element chip manufacturing method |
Atsushi Harikai, Shogo Okita, Akihiro Itou, Katsumi Takano |
2018-08-14 |
| 9941167 |
Method for manufacturing element chip |
Bunzi Mizuno, Shogo Okita, Tutomu Sakurai, Noriyuki Matsubara |
2018-04-10 |
| 9922899 |
Method of manufacturing element chip and element chip |
Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune |
2018-03-20 |
| 9911677 |
Element chip and method for manufacturing the same |
Bunzi Mizuno, Shogo Okita, Noriyuki Matsubara, Atsushi Harikai |
2018-03-06 |
| 9905452 |
Method of forming mask pattern, method of processing substrate, and method of fabricating element chips |
Atsushi Harikai |
2018-02-27 |
| 9779986 |
Plasma treatment method and method of manufacturing electronic component |
Atsushi Harikai, Noriyuki Matsubara, Hideo Kanou, Syouzou Watanabe, Toshihiro Wada |
2017-10-03 |
| 9698073 |
Method of manufacturing element chip and element chip |
Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune |
2017-07-04 |
| 9653334 |
Plasma processing apparatus and method |
Noriyuki Matsubara, Atsushi Harikai |
2017-05-16 |
| 9583355 |
Plasma processing apparatus and plasma processing method |
Nobuhiro Nishizaki, Atsushi Harikai, Tetsuhiro Iwai |
2017-02-28 |
| 9431263 |
Plasma processing method and apparatus |
Atsushi Harikai, Noriyuki Matsubara |
2016-08-30 |
| 8906249 |
Plasma processing apparatus and plasma processing method |
Hiromi Asakura |
2014-12-09 |
| 8673166 |
Plasma processing apparatus and plasma processing method |
Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Toshihiro Wada, Mitsuhiro Okune |
2014-03-18 |
| 8563332 |
Wafer reclamation method and wafer reclamation apparatus |
Shogo Okita, Gaku Sugahara, Hiroyuki Suzuki, Ryuzou Houchin |
2013-10-22 |