Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398372 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Noriyuki Matsubara, Toshihiro Wada | 2022-07-26 |
| 10497622 | Element chip manufacturing method | Shogo Okita, Atsushi Harikai, Noriyuki Matsubara, Akihiro Itou | 2019-12-03 |
| 10475704 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune | 2019-11-12 |
| 10236266 | Element chip manufacturing method | Atsushi Harikai, Shogo Okita, Akihiro Itou, Katsumi Takano | 2019-03-19 |
| 10177063 | Element chip and method for manufacturing the same | Bunzi Mizuno, Shogo Okita, Noriyuki Matsubara, Atsushi Harikai | 2019-01-08 |
| 10049933 | Element chip manufacturing method | Atsushi Harikai, Shogo Okita, Akihiro Itou, Katsumi Takano | 2018-08-14 |
| 9941167 | Method for manufacturing element chip | Bunzi Mizuno, Shogo Okita, Tutomu Sakurai, Noriyuki Matsubara | 2018-04-10 |
| 9922899 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune | 2018-03-20 |
| 9911677 | Element chip and method for manufacturing the same | Bunzi Mizuno, Shogo Okita, Noriyuki Matsubara, Atsushi Harikai | 2018-03-06 |
| 9905452 | Method of forming mask pattern, method of processing substrate, and method of fabricating element chips | Atsushi Harikai | 2018-02-27 |
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Atsushi Harikai, Noriyuki Matsubara, Hideo Kanou, Syouzou Watanabe, Toshihiro Wada | 2017-10-03 |
| 9698073 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuhiro Okune | 2017-07-04 |
| 9653334 | Plasma processing apparatus and method | Noriyuki Matsubara, Atsushi Harikai | 2017-05-16 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Atsushi Harikai, Tetsuhiro Iwai | 2017-02-28 |
| 9431263 | Plasma processing method and apparatus | Atsushi Harikai, Noriyuki Matsubara | 2016-08-30 |
| 8906249 | Plasma processing apparatus and plasma processing method | Hiromi Asakura | 2014-12-09 |
| 8673166 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Toshihiro Wada, Mitsuhiro Okune | 2014-03-18 |
| 8563332 | Wafer reclamation method and wafer reclamation apparatus | Shogo Okita, Gaku Sugahara, Hiroyuki Suzuki, Ryuzou Houchin | 2013-10-22 |