Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10232293 | Fiber laminate and manufacturing method thereof | Koji Motomura, Kouji Ikeda, Takahiko Murata, Takatoshi Mitsushima | 2019-03-19 |
| 9583355 | Plasma processing apparatus and plasma processing method | Atsushi Harikai, Tetsuhiro Iwai, Mitsuru Hiroshima | 2017-02-28 |
| 6218196 | Etching apparatus, etching method, manufacturing method of a semiconductor device, and semiconductor device | Hirotoshi Ise, Takayuki Ikushima, Minoru Hanazaki | 2001-04-17 |