Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551943 | Plasma processing apparatus | — | 2023-01-10 |
| 10796932 | Plasma processing apparatus | — | 2020-10-06 |
| 10734203 | Plasma processing apparatus and plasma processing method | Motoko Hara | 2020-08-04 |
| 10672593 | Plasma processing apparatus and plasma processing method | Motoko Hara | 2020-06-02 |
| 9842750 | Plasma processing method | — | 2017-12-12 |
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Shogo Okita, Syouzou Watanabe | 2017-10-10 |
| 9583355 | Plasma processing apparatus and plasma processing method | Nobuhiro Nishizaki, Atsushi Harikai, Mitsuru Hiroshima | 2017-02-28 |
| 9401286 | Plasma processing apparatus | — | 2016-07-26 |
| 8945411 | Plasma processing apparatus and plasma processing method | — | 2015-02-03 |
| 8513097 | Plasma processing apparatus | — | 2013-08-20 |
| 7994026 | Plasma dicing apparatus and method of manufacturing semiconductor chips | Atsushi Harikai, Kiyoshi Arita | 2011-08-09 |
| 7708860 | Plasma processing apparatus | Kiyoshi Arita, Akira Nakagawa | 2010-05-04 |
| 7138034 | Electrode member used in a plasma treating apparatus | Kiyoshi Arita, Hiroshi Haji, Shoji Sakemi, Taiji Matano, Nobuhiro Satou | 2006-11-21 |
| 7074720 | Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device | Kiyoshi Arita, Hiroshi Haji, Shoji Sakemi | 2006-07-11 |
| 7056831 | Plasma processing apparatus and plasma processing method | Kiyoshi Arita | 2006-06-06 |
| 6921720 | Plasma treating apparatus and plasma treating method | Kiyoshi Arita, Junichi Terayama | 2005-07-26 |
| 6867146 | Plasma processing method | Kiyoshi Arita | 2005-03-15 |
| 6784112 | Method for surface treatment of silicon based substrate | Kiyoshi Arita, Hiroshi Haji, Shoji Sakemi | 2004-08-31 |
| 6723651 | Plasma processing method | Kiyoshi Arita, Shoji Sakemi | 2004-04-20 |
| 6551444 | Plasma processing apparatus and method of processing | Ryota Furukawa | 2003-04-22 |
| 6511895 | Semiconductor wafer turning process | Yutaka Koma, Kiyoshi Arita, Hiroshi Haji | 2003-01-28 |
| 6468351 | Vacuum processing apparatus with improved maintainability | Kazuhiro Noda, Hiroshi Haji | 2002-10-22 |
| 6340639 | Plasma process apparatus and plasma process method for substrate | Kiyoshi Arita, Hiroshi Haji | 2002-01-22 |