Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8757090 | Gas shower plate for plasma processing apparatus | Kiyoshi Arita, Akira Nakagawa, Koji Kuga, Nobuhiro Sato | 2014-06-24 |
| 7138034 | Electrode member used in a plasma treating apparatus | Kiyoshi Arita, Tetsuhiro Iwai, Hiroshi Haji, Shoji Sakemi, Nobuhiro Satou | 2006-11-21 |
| 4572902 | Method for producing ceramic sintered body of a Si.sub.3 N.sub.4 -SiC system | Haruyuki Ueno, Kazushige Fukuda | 1986-02-25 |