Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398372 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Noriyuki Matsubara, Mitsuru Hiroshima, Toshihiro Wada | 2022-07-26 |
| 9786472 | Plasma processing apparatus and method for manufacturing electronic component | Tetsuhiro Iwai, Shogo Okita | 2017-10-10 |
| 9779986 | Plasma treatment method and method of manufacturing electronic component | Atsushi Harikai, Noriyuki Matsubara, Hideo Kanou, Mitsuru Hiroshima, Toshihiro Wada | 2017-10-03 |
| 8673166 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Toshihiro Wada, Mitsuhiro Okune, Mitsuru Hiroshima | 2014-03-18 |
| 8591754 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Ryuzou Houchin, Hiroyuki Suzuki | 2013-11-26 |
| 8303765 | Plasma etching apparatus | Shogo Okita, Hiroyuki Suzuki, Ryuuzou Houtin | 2012-11-06 |
| 8231798 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Ryuzou Houchin, Hiroyuki Suzuki | 2012-07-31 |
| 7736528 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Ryuzou Houchin, Hiroyuki Suzuki | 2010-06-15 |
| 5609690 | Vacuum plasma processing apparatus and method | Masaki Suzuki, Ichiro Nakayama, Tomohiro Okumura | 1997-03-11 |