Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591754 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Hiroyuki Suzuki | 2013-11-26 |
| 8563332 | Wafer reclamation method and wafer reclamation apparatus | Shogo Okita, Gaku Sugahara, Hiroyuki Suzuki, Mitsuru Hiroshima | 2013-10-22 |
| 8231798 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Hiroyuki Suzuki | 2012-07-31 |
| 7736528 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Hiroyuki Suzuki | 2010-06-15 |