Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145494 | Plasma processing apparatus | Shogo Okita | 2021-10-12 |
| 10475704 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima | 2019-11-12 |
| 9922899 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima | 2018-03-20 |
| 9698073 | Method of manufacturing element chip and element chip | Atsushi Harikai, Shogo Okita, Noriyuki Matsubara, Mitsuru Hiroshima | 2017-07-04 |
| 8673166 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Syouzou Watanabe, Toshihiro Wada, Mitsuru Hiroshima | 2014-03-18 |