Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145486 | Beam profile determination method and ion beam irradiation apparatus | — | 2021-10-12 |
| 8604683 | Bucket-type ion source for fanning cusped magnetic fields inside a plasma generation chamber | Takeshi Matsumoto, Masahiro Tanii, Katsuharu Imai | 2013-12-10 |
| 8258043 | Manufacturing method of thin film semiconductor substrate | Toshiyuki Sameshima, Takeshi Matsumoto, Yuko Fujimoto | 2012-09-04 |
| 8147705 | Method of operating ion source and ion implanting apparatus | Syojiro Dohi, Yasunori Ando, Yasuhiro Matsuda | 2012-04-03 |
| 6184624 | Ion source | — | 2001-02-06 |