Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278092 | Plasma treatment device | Toshihiko Sakai, Daisuke Azuma, Seiji Nakata | 2025-04-15 |
| 12136533 | Antenna mechanism and plasma processing device | Daisuke Matsuo | 2024-11-05 |
| 11615922 | Capacitive element and plasma processing device | Dongwei Li | 2023-03-28 |
| 11417752 | Method for producing thin film transistor | Daisuke Matsuo, Yoshitaka Setoguchi, Shigeaki Kishida | 2022-08-16 |
| 11251020 | Sputtering apparatus | Shigeaki Kishida, Daisuke Matsuo, Yoshitaka Setoguchi | 2022-02-15 |
| 11217429 | Plasma processing device | — | 2022-01-04 |
| 10932353 | Antenna for generating plasma, and plasma treatment device and antenna structure provided with antenna for generating plasma | Dongwei Li, Kiyoshi Kubota | 2021-02-23 |
| 9947511 | Antenna for plasma generation and plasma processing device having the same | Dongwei Li | 2018-04-17 |
| 9897236 | Pipe holding connection structure and high frequency antenna device including the same | Dongwei Li | 2018-02-20 |
| 9142425 | Method for fabricating thin-film transistor | — | 2015-09-22 |
| 9058982 | Silicon oxynitride film and method for forming same, and semiconductor device | Eiji Takahashi, Masaki Fujiwara | 2015-06-16 |
| 8917022 | Plasma generation device and plasma processing device | Akinori Ebe, Masanori Watanabe | 2014-12-23 |
| 8394232 | Plasma processing apparatus | — | 2013-03-12 |
| 8372239 | Plasma processing apparatus | Takanori Tsunoda, Yoshio Matsubara, Masayuki Tsuji | 2013-02-12 |
| 8147705 | Method of operating ion source and ion implanting apparatus | Yutaka Inouchi, Syojiro Dohi, Yasuhiro Matsuda | 2012-04-03 |
| 7935167 | Composite ceramic body, method of manufacturing the same and ceramic filter assembly | Keita MIYAJIMA | 2011-05-03 |
| 7588628 | Microporous ceramic materials | Seiji Yamada, Hisatomi Taguchi, Yosuke Takahashi, Shigeo Nagaya, Kiyoshi Komura | 2009-09-15 |
| 7436075 | Ion beam irradiation apparatus and ion beam irradiation method | — | 2008-10-14 |
| 7390347 | Zeolite membranes for selective oxidation of carbon monoxide in mixed hydrogen gas source | Katsuki Kusakabe, Yasuhisa Hasegawa, Shigeharu Morooka | 2008-06-24 |
| 7367139 | Vacuum processing apparatus and method operation thereof | Masatoshi Onoda | 2008-05-06 |
| 7109137 | Methods for making microporous ceramic materials | Balagopal N. Nair, Hisatomi Taguchi, Shigeo Nagaya, Kiyoshi Komura | 2006-09-19 |
| 7078714 | Ion implanting apparatus | Syuichi Maeno, Masao Naito, Hilton F. Glavish | 2006-07-18 |
| 6903039 | Methods for making microporous ceramic materials | Balagopal N. Nair, Hisatomi Taguchi, Shigeo Nagaya, Kiyoshi Komura | 2005-06-07 |
| 6555831 | Ion implanting apparatus | Masashi Konishi, Shuichi Maeno | 2003-04-29 |
| 6092485 | Apparatus and method for processing substrate | Masatoshi Onoda | 2000-07-25 |