Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862431 | Plasma control system and plasma control program | Tsubasa Iwakoke | 2024-01-02 |
| 11417752 | Method for producing thin film transistor | Daisuke Matsuo, Yasunori Ando, Yoshitaka Setoguchi | 2022-08-16 |
| 11328913 | Sputtering device | Daisuke Matsuo | 2022-05-10 |
| 11251020 | Sputtering apparatus | Daisuke Matsuo, Yoshitaka Setoguchi, Yasunori Ando | 2022-02-15 |
| 7988835 | Silicon dot forming method and silicon dot forming apparatus | Eiji Takahashi, Takashi Mikami, Kenji Kato, Atsushi Tomyo, Tsukasa Hayashi +2 more | 2011-08-02 |
| 6051120 | Thin film forming apparatus | Takashi Mikami, Hiroya Kirimura, Kiyoshi Ogata | 2000-04-18 |