Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147705 | Method of operating ion source and ion implanting apparatus | Yutaka Inouchi, Yasunori Ando, Yasuhiro Matsuda | 2012-04-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147705 | Method of operating ion source and ion implanting apparatus | Yutaka Inouchi, Yasunori Ando, Yasuhiro Matsuda | 2012-04-03 |