Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249479 | Substrate holding device | Yusuke Otsuki, Ippei Nishimura | 2025-03-11 |
| 11776839 | Substrate holding device | Ippei Nishimura | 2023-10-03 |
| 11751287 | Substrate heating device | Ryosuke Goto, Kazuo Shimizu, Yasuhiro Kishimoto | 2023-09-05 |
| 11127616 | Substrate accommodation device | Koyu Ueno | 2021-09-21 |
| 9784317 | Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method | — | 2017-10-10 |
| 9230776 | Ion irradiation apparatus and ion irradiation method | Takeshi Matsumoto, Koichi Orihira | 2016-01-05 |
| 8143595 | Ion implanter | Junichi Tatemichi, Kohichi Orihira | 2012-03-27 |
| 7849814 | Plasma generating device | Eiji Takahashi | 2010-12-14 |
| 7367139 | Vacuum processing apparatus and method operation thereof | Yasunori Ando | 2008-05-06 |
| 6092485 | Apparatus and method for processing substrate | Yasunori Ando | 2000-07-25 |