Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230776 | Ion irradiation apparatus and ion irradiation method | Takeshi Matsumoto, Masatoshi Onoda | 2016-01-05 |
| 5685363 | Substrate holding device and manufacturing method therefor | Yasunori Ando, Hiroshi Inami | 1997-11-11 |