Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553395 | Ion beam irradiation device and ion beam irradiation method | — | 2020-02-04 |
| 5685363 | Substrate holding device and manufacturing method therefor | Koichi Orihira, Yasunori Ando | 1997-11-11 |