Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7148705 | Charging voltage measuring device for substrate and ion beam irradiating device | — | 2006-12-12 |
| 6943568 | Charging voltage measuring device for substrate and ion beam irradiating device | — | 2005-09-13 |
| 6555831 | Ion implanting apparatus | Masashi Konishi, Yasunori Ando | 2003-04-29 |
| 6060836 | Plasma generating apparatus and ion source using the same | Yasunori Ando, Yasuhiro Matsuda | 2000-05-09 |