Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115565 | Plasma processing apparatus and plasma processing method | Tomohiro Okumura | 2018-10-30 |
| 9397242 | Silicon substrate having textured surface, and process for producing same | Yasushi Taniguchi, Shigeru Sankawa, Sr., Kouji Arai, Hiroshi Tanabe, Naoshi Yamaguchi | 2016-07-19 |
| 9105803 | Polycrystalline-type solar cell panel and process for production thereof | Hitoshi Yamanishi, Yoshihisa Ohido, Nobuyuki Kamikihara, Tomohiro Okumura | 2015-08-11 |
| 8821053 | Paper discharge guide with protruding part for supporting paper at an angle | — | 2014-09-02 |
| 8802567 | Plasma processing method | Tomohiro Okumura, Hiroshi Kawaura, Tetsuya Yukimoto | 2014-08-12 |
| 8772067 | Silicon substrate having textured surface, solar cell having same, and method for producing same | Tsuyoshi Nomura, Tomohiro Okumura, Mitsuo Saitoh, Hiroshi Tanabe, Yukiya Usui | 2014-07-08 |
| 8709926 | Plasma doping method and plasma doping apparatus | Tomohiro Okumura, Bunji Mizuno, Yuichiro Sasaki | 2014-04-29 |
| 8703613 | Plasma processing apparatus and plasma processing method | Tomohiro Okumura, Mitsuo Saitoh | 2014-04-22 |
| 8652953 | Plasma doping method with gate shutter | Tomohiro Okumura, Yuichiro Sasaki, Katsumi Okashita, Bunji Mizuno, Hiroyuki Ito +1 more | 2014-02-18 |
| 8624340 | Plasma processing apparatus and method thereof | Tomohiro Okumura, Hiroshi Kawaura, Tetsuya Yukimoto | 2014-01-07 |
| 8550734 | Transportation guide mechanism and recording device having the same | — | 2013-10-08 |
| 8450819 | Plasma doping method and apparatus thereof | Tomohiro Okumura, Mitsuo Saitoh, Taro Kitaoka | 2013-05-28 |
| 8404573 | Plasma processing method and apparatus | Tomohiro Okumura, Yuichiro Sasaki, Satoshi Maeshima, Bunji Mizuno | 2013-03-26 |
| 8288259 | Plasma processing method and apparatus | Tomohiro Okumura, Satoshi Maeshima, Bunji Mizuno, Yuichiro Sasaki | 2012-10-16 |
| 8257501 | Plasma doping device with gate shutter | Tomohiro Okumura, Yuichiro Sasaki, Katsumi Okashita, Bunji Mizuno, Hiroyuki Ito +1 more | 2012-09-04 |
| 8129202 | Plasma doping method and apparatus | Tomohiro Okumura, Yuichiro Sasaki, Katsumi Okashita, Hiroyuki Ito, Bunji Mizuno +1 more | 2012-03-06 |
| 7863168 | Plasma doping method and plasma doping apparatus | Tomohiro Okumura, Bunji Mizuno, Yuichiro Sasaki | 2011-01-04 |
| 7858479 | Method and apparatus of fabricating semiconductor device | Bunji Mizuno, Yuichiro Sasaki, Hiroyuki Ito, Tomohiro Okumura, Cheng Jin +2 more | 2010-12-28 |
| 7858155 | Plasma processing method and plasma processing apparatus | Tomohiro Okumura, Yuichiro Sasaki, Katsumi Okashita, Cheng Jin, Satoshi Maeshima +2 more | 2010-12-28 |
| 7858537 | Plasma processing method and apparatus | Tomohiro Okumura, Satoshi Maeshima, Bunji Mizuno, Yuichiro Sasaki | 2010-12-28 |
| 7759254 | Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device | Yuichiro Sasaki, Katsumi Okashita, Bunji Mizuno, Hiroyuki Ito, Cheng Jin +3 more | 2010-07-20 |
| 7682954 | Method of impurity introduction, impurity introduction apparatus and semiconductor device produced with use of the method | Yuichiro Sasaki, Bunji Mizuno | 2010-03-23 |
| 7666770 | Method of controlling impurity doping and impurity doping apparatus | Yuichiro Sasaki, Tomohiro Okumura, Satoshi Maeshima | 2010-02-23 |
| 7626184 | Impurity introducing apparatus and impurity introducing method | Bunji Mizuno, Yuichiro Sasaki, Tomohiro Okumura, Cheng Jin, Hiroyuki Ito | 2009-12-01 |
| 7622725 | Impurity introducing apparatus and impurity introducing method | Bunji Mizuno, Yuichiro Sasaki, Tomohiro Okumura, Cheng Jin, Hiroyuki Ito | 2009-11-24 |