Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7601619 | Method and apparatus for plasma processing | Tomohiro Okumura, Yuichiro Sasaki, Katsumi Okashita, Hiroyuki Ito, Bunji Mizuno +1 more | 2009-10-13 |
| 7582492 | Method of doping impurities, and electronic element using the same | Cheng Jin, Yuichiro Sasaki, Bunji Mizuno, Katsumi Okashita, Hiroyuki Ito +2 more | 2009-09-01 |
| 7575987 | Method of plasma doping | Tomohiro Okumura, Bunji Mizuno | 2009-08-18 |
| 7547619 | Method of introducing impurity, device and element | Yuichiro Sasaki, Bunji Mizuno | 2009-06-16 |
| 7510667 | Plasma processing method and apparatus | Tomohiro Okumura | 2009-03-31 |
| 7465407 | Plasma processing method and apparatus | Mitsuo Saitoh, Tomohiro Okumura | 2008-12-16 |
| 7456085 | Method for introducing impurities | Yuichiro Sasaki, Tomohiro Okumura, Bunji Mizuno, Cheng Jin, Satoshi Maeshima +1 more | 2008-11-25 |
| 7378031 | Liquid phase etching method and liquid phase etching apparatus | Bunji Mizuno, Yuichiro Sasaki, Hisataka Kanada | 2008-05-27 |
| D561666 | Foot brake lock | — | 2008-02-12 |
| 7294462 | Method for detection of base sequence of interest | Hisanori Nasu, Hiroaki Ono, Akito Mugita, Takanori Kobayashi, Tetsuji Masaoka +2 more | 2007-11-13 |
| 7205250 | Plasma processing method and apparatus | Yoshihiro Yanagi | 2007-04-17 |
| 7199064 | Plasma processing method and apparatus | Tomohiro Okumura, Satoshi Maeshima, Bunji Mizuno, Yuichiro Sasaki | 2007-04-03 |
| 7192854 | Method of plasma doping | Yuichiro Sasaki, Bunji Mizuno, Hisataka Kanada, Tomohiro Okumura | 2007-03-20 |
| 7135089 | Method and apparatus for plasma processing | Tomohiro Okumura | 2006-11-14 |
| 6875307 | Method and apparatus for plasma processing | Tomohiro Okumura | 2005-04-05 |
| 6784080 | Method of manufacturing semiconductor device by sputter doping | Bunji Mizuno, Hiroaki Nakaoka, Michihiko Takase | 2004-08-31 |
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Tomohiro Okumura, Yukihiro Maegawa, Kibatsu Shinohara, Minoru Kanda +1 more | 2004-03-16 |
| 6217951 | Impurity introduction method and apparatus thereof and method of manufacturing semiconductor device | Bunji Mizuno, Hiroaki Nakaoka, Michihiko Takase | 2001-04-17 |
| 6177646 | Method and device for plasma treatment | Tomohiro Okumura, Shozo Watanabe, Hideo Haraguchi | 2001-01-23 |
| 6093457 | Method for plasma processing | Tomohiro Okumura | 2000-07-25 |
| 6030667 | Apparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasma | Hideo Nakagawa, Shigenori Hayashi, Tomohiro Okumura | 2000-02-29 |
| 5922223 | Plasma processing method and apparatus | Tomohiro Okumura, Hideo Haraguchi, Yoshihiro Yanagi | 1999-07-13 |
| 5916820 | Thin film forming method and apparatus | Tomohiro Okumura, Yuichiro Yamada, Naoki Suzuki | 1999-06-29 |
| 5888413 | Plasma processing method and apparatus | Tomohiro Okumura, Yoshihiro Yanagi | 1999-03-30 |
| 5851906 | Impurity doping method | Bunji Mizuno, Hiroaki Nakaoka, Michihiko Takase | 1998-12-22 |