Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7513214 | Plasma processing method and apparatus | Tomohiro Okumura, Takuya Matsui, Izuru Matsuda, Akio Mitsuhashi | 2009-04-07 |
| 6808759 | Plasma processing method and apparatus | Tomohiro Okumura, Takuya Matsui, Izuru Matsuda, Akio Mitsuhashi | 2004-10-26 |
| 6648976 | Apparatus and method for plasma processing | Izuru Matsuda, Takuya Matsui, Shigeyuki Yamamoto | 2003-11-18 |
| 6642533 | Substrate detecting method and device | Izuru Matsuda, Shigeyuki Yamamoto | 2003-11-04 |
| 6447613 | Substrate dechucking device and substrate dechucking method | Izuru Matsuda | 2002-09-10 |
| 6340281 | Method and apparatus for positioning a disk-shaped object | Izuru Matsuda | 2002-01-22 |
| 6276892 | Wafer handling apparatus | Izuru Matsuda | 2001-08-21 |
| 6254683 | Substrate temperature control method and device | Izuru Matsuda | 2001-07-03 |
| 6255223 | Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith | Izuru Matsuda, Shigeyuki Yamamoto | 2001-07-03 |
| 6177646 | Method and device for plasma treatment | Tomohiro Okumura, Ichiro Nakayama, Shozo Watanabe | 2001-01-23 |
| 5974217 | Information transmission system having a reduced number of stored programs and recording media playback drives | — | 1999-10-26 |
| 5922223 | Plasma processing method and apparatus | Tomohiro Okumura, Ichiro Nakayama, Yoshihiro Yanagi | 1999-07-13 |
| 5851296 | Vacuum processing apparatus and method | Masaki Suzuki, Toshimichi Ishida | 1998-12-22 |
| 5721803 | Information transmission system having a reduced number of stored programs and recording media playback devices | — | 1998-02-24 |
| 5636963 | Method of handling wafers in a vacuum processing apparatus | Masaki Suzuki, Toshimichi Ishida | 1997-06-10 |
| 5450139 | Apparatus for transmitting video signals comprising a memory backup device | Kaichi Tatsuzawa, Hiroyuki Yamauchi | 1995-09-12 |