Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851296 | Vacuum processing apparatus and method | Hideo Haraguchi, Masaki Suzuki | 1998-12-22 |
| 5766364 | Plasma processing apparatus | Yuichiro Yamada, Takahiro Takisawa, Hiroshi Tanabe | 1998-06-16 |
| 5636963 | Method of handling wafers in a vacuum processing apparatus | Hideo Haraguchi, Masaki Suzuki | 1997-06-10 |
| 5151008 | Substrate transfer apparatus | Masaki Suzuki | 1992-09-29 |
| 4314870 | Method of mounting electronic components | Takeo Takayanagi, Yasuo Taki | 1982-02-09 |