Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7513214 | Plasma processing method and apparatus | Tomohiro Okumura, Hideo Haraguchi, Takuya Matsui, Akio Mitsuhashi | 2009-04-07 |
| 7406925 | Plasma processing method and apparatus | Tomohiro Okumura, Yukihiro Maegawa, Takayuki Kai, Mitsuo Saitoh | 2008-08-05 |
| 7292056 | Membrane with bumps, method of manufacturing the same, and method of testing electrical circuit | — | 2007-11-06 |
| 6864640 | Plasma processing method and apparatus thereof | Tomohiro Okumura, Yukihiro Maegawa | 2005-03-08 |
| 6830653 | Plasma processing method and apparatus | Tomohiro Okumura, Yukihiro Maegawa, Takayuki Kai, Mitsuo Saitoh | 2004-12-14 |
| 6808759 | Plasma processing method and apparatus | Tomohiro Okumura, Hideo Haraguchi, Takuya Matsui, Akio Mitsuhashi | 2004-10-26 |
| 6648976 | Apparatus and method for plasma processing | Hideo Haraguchi, Takuya Matsui, Shigeyuki Yamamoto | 2003-11-18 |
| 6642533 | Substrate detecting method and device | Hideo Haraguchi, Shigeyuki Yamamoto | 2003-11-04 |
| 6447613 | Substrate dechucking device and substrate dechucking method | Hideo Haraguchi | 2002-09-10 |
| 6340281 | Method and apparatus for positioning a disk-shaped object | Hideo Haraguchi | 2002-01-22 |
| 6276892 | Wafer handling apparatus | Hideo Haraguchi | 2001-08-21 |
| 6255223 | Substrate handling method and apparatus, and attractive force inspection method and apparatus used therewith | Hideo Haraguchi, Shigeyuki Yamamoto | 2001-07-03 |
| 6254683 | Substrate temperature control method and device | Hideo Haraguchi | 2001-07-03 |
| 5514243 | Dry etching apparatus | Masaki Suzuki | 1996-05-07 |