Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387917 | Plasma processing apparatus and plasma processing method | Hiroki Endo, Tong Wu | 2025-08-12 |
| 11380568 | Transfer method and transfer system | Kippei Sugita, Daisuke Kawano | 2022-07-05 |
| 10861729 | Transfer method and transfer system | Kippei Sugita, Daisuke Kawano | 2020-12-08 |
| 7205250 | Plasma processing method and apparatus | Ichiro Nakayama | 2007-04-17 |
| 6875698 | Dry etching method | Kiyohiko Takagi, Teiichi Kimura | 2005-04-05 |
| 5922223 | Plasma processing method and apparatus | Tomohiro Okumura, Hideo Haraguchi, Ichiro Nakayama | 1999-07-13 |
| 5888413 | Plasma processing method and apparatus | Tomohiro Okumura, Ichiro Nakayama | 1999-03-30 |
| 5711850 | Plasma processing apparatus | Tomohiro Okumura, Ichiro Nakayama | 1998-01-27 |
| 5558722 | Plasma processing apparatus | Tomohiro Okumura, Ichiro Nakayama | 1996-09-24 |