Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198954 | Execution device and execution method | — | 2025-01-14 |
| 11869752 | System and method for transferring a focus ring into processing apparatus | Kenji Nagai | 2024-01-09 |
| 11817335 | Method and system for inspecting processing apparatus | Kenji Nagai | 2023-11-14 |
| 11735402 | Measurement method and measurement apparatus | Takashi Kubo, Yuhei Shimatsu | 2023-08-22 |
| 11604097 | Calibration method and calibration system | Hana Sasaki, Kaoru Inaba, Mitsuru Dohiwa, Takashi Niinuma, Hikaru Fujiwara | 2023-03-14 |
| 11513194 | Ranging apparatus and method using the ranging apparatus | Kenji Nagai | 2022-11-29 |
| 11380568 | Transfer method and transfer system | Daisuke Kawano, Yoshihiro Yanagi | 2022-07-05 |
| 11164729 | Measuring device and operation method of system for inspecting focus ring | Daisuke Kawano | 2021-11-02 |
| 10964575 | Transfer robot system, teaching method and wafer receptacle | Kenji Nagai | 2021-03-30 |
| 10948317 | Measuring device and method for obtaining amount of deviation of measuring device | Daisuke Kawano | 2021-03-16 |
| 10903100 | Method of obtaining amount of deviation of a measuring device, and method of calibrating transfer position data in a processing system | Daisuke Kawano | 2021-01-26 |
| 10861729 | Transfer method and transfer system | Daisuke Kawano, Yoshihiro Yanagi | 2020-12-08 |
| 10837810 | Method for calibrating measuring device and case used in the calibration method | Tomohide Minami | 2020-11-17 |
| 10837991 | Electrostatic capacitance measuring device | Tomohide Minami, Satoru Nishio | 2020-11-17 |
| 10634479 | Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument | Tomohide Minami | 2020-04-28 |
| 10354896 | Position detection system and processing apparatus | Kenji Nagai | 2019-07-16 |
| 10199251 | Position detecting system and processing apparatus | Kenji Nagai, Hidetoshi Kimura | 2019-02-05 |
| 10074549 | Method for acquiring data indicating electrostatic capacitance | Tomohide Minami | 2018-09-11 |
| 10018484 | Sensor chip for electrostatic capacitance measurement and measuring device having the same | Tomohide Minami | 2018-07-10 |
| 9903739 | Sensor chip for electrostatic capacitance measurement and measuring device having the same | Tomohide Minami | 2018-02-27 |
| 9841395 | System of inspecting focus ring and method of inspecting focus ring | Tomohide Minami | 2017-12-12 |
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Tatsuya Yamaguchi, Yoshinori Morisada, Makoto Fujikawa | 2017-07-18 |
| 9349584 | Method for depositing a film and film deposition apparatus | Hiroyuki Hashimoto, Muneo Harada | 2016-05-24 |
| 9163311 | Film forming apparatus | Harunari Hasegawa, Atsushi Ando, Yoshiki Fukuhara, Makoto Takahashi | 2015-10-20 |
| 9127358 | Film forming apparatus | Mitsuya Inoue, Yasunori Kumagai | 2015-09-08 |