Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Hiroyuki Miyashita, Yuki Osada, Mitsutoshi ASHIDA | 2023-01-31 |
| 11411541 | High frequency power supply device and high frequency power supply method | Mitsutoshi ASHIDA | 2022-08-09 |
| 9741498 | Current collector, electrode, secondary battery and capacitor | Takahiro Iida, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Tsugio Kataoka +5 more | 2017-08-22 |
| 9563209 | Raw material gas supply method | Makoto TAKADO | 2017-02-07 |
| 9127358 | Film forming apparatus | Yasunori Kumagai, Kippei Sugita | 2015-09-08 |