Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237157 | Plasma measurement method | Eiki KAMATA, Mikio Sato, Taro Ikeda | 2025-02-25 |
| 11842886 | Plasma processing method and plasma processing apparatus | Taro Ikeda, Hirokazu Ueda, Eiki KAMATA, Isao Gunji | 2023-12-12 |
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Hiroyuki Miyashita, Yuki Osada, Mitsuya Inoue | 2023-01-31 |
| 11411541 | High frequency power supply device and high frequency power supply method | Mitsuya Inoue | 2022-08-09 |
| 10818478 | High frequency generator and plasma processing apparatus | — | 2020-10-27 |
| 9384945 | Automatic matching unit and plasma processing apparatus | — | 2016-07-05 |
| 9337001 | Microwave processing apparatus and control method thereof | — | 2016-05-10 |
| 9224623 | Microwave irradiation apparatus | Shigeru Kasai, Ryoji Yamazaki, Yuji Obata, Sumi Tanaka | 2015-12-29 |
| 9011636 | Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus | — | 2015-04-21 |
| 8907259 | Microwave irradiation device and microwave irradiation method | Shigeru Kasai | 2014-12-09 |