Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068208 | Plasma processing apparatus and control method | Taro Ikeda | 2024-08-20 |
| 11569558 | Directional coupler for use in a substrate processing apparatus, where the directional coupler includes a coaxial line coupled to a conductor on a substrate | Isao Takahashi, Hiroyuki Miyashita, Mitsuya Inoue, Mitsutoshi ASHIDA | 2023-01-31 |
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Jun NAKAGOMI, Yoshiyuki Harima | 2022-02-08 |
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Hiroyuki Miyashita, Susumu Saito, Kazuhiro Furuki +2 more | 2021-11-02 |
| 11152269 | Plasma processing apparatus and control method | Taro Ikeda | 2021-10-19 |
| 10971413 | Plasma processing apparatus and control method | Taro Ikeda | 2021-04-06 |
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Taro Ikeda, Shigeru Kasai, Emiko HARA, Yutaka Fujino, Jun NAKAGOMI +1 more | 2020-02-11 |
| 10414432 | Vehicle display device | Hirotaka SAITO, Junya Seki, Kazufumi Suzuki | 2019-09-17 |
| 10324470 | Vehicle control device and vehicle | Hirotaka SAITO, Junya Seki, Kazufumi Suzuki | 2019-06-18 |
| 10293749 | Vehicle control device and vehicle | Hirotaka SAITO, Junya Seki, Kazufumi Suzuki | 2019-05-21 |
| 9702913 | Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method | Taro Ikeda, Yutaka Fujino, Hikaru Adachi, Hiroyuki Miyashita, Nobuhiko Yamamoto | 2017-07-11 |
| 9548187 | Microwave radiation antenna, microwave plasma source and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Shigeru Kasai, Hiroyuki Miyashita, Akira Tanihara +1 more | 2017-01-17 |
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Taro Ikeda, Hiroyuki Miyashita, Yutaka Fujino, Tomohito Komatsu | 2016-12-13 |
| 9520273 | Tuner, microwave plasma source and impedance matching method | Hiroyuki Miyashita | 2016-12-13 |
| 9281154 | Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus | Taro Ikeda, Shigeru Kasai, Hiroyuki Miyashita | 2016-03-08 |
| 9072158 | Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion | Taro Ikeda, Shigeru Kasai | 2015-06-30 |
| 8945342 | Surface wave plasma generating antenna and surface wave plasma processing apparatus | Taro Ikeda, Shigeru Kasai | 2015-02-03 |
| 8308898 | Tuner and microwave plasma source | Shigeru Kasai, Taro Ikeda | 2012-11-13 |
| 8163128 | Plasma processing apparatus | Shigeru Kasai, Takashi Ogino | 2012-04-24 |
| 7915827 | Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium | Shigeru Kasai | 2011-03-29 |
| 7445690 | Plasma processing apparatus | Shigeru Kasai, Takashi Ogino | 2008-11-04 |
| 7355379 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Shigeru Kasai, Takashi Ogino | 2008-04-08 |
| 7226524 | Plasma processing apparatus | Shigeru Kasai, Nobuhiko Yamamoto, Hikaru Adachi | 2007-06-05 |
| 7176634 | Coaxial type impedance matching device and impedance detecting method for plasma generation | Toshiaki Kitamura, Koichi Rokuyama, Shigeru Kasai, Takashi Ogino | 2007-02-13 |
| 7070333 | Lubrication structure for rolling bearing | Akira Ito, Kimitoshi Sato | 2006-07-04 |