Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508556 | Plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Kei Nagayosi | 2022-11-22 |
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Yuki Osada, Yoshiyuki Harima | 2022-02-08 |
| 10804078 | Plasma processing apparatus and gas introduction mechanism | Yutaka Fujino, Tomohito Komatsu, Taro Ikeda, Takeo Wakutsu | 2020-10-13 |
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Taro Ikeda, Shigeru Kasai, Emiko HARA, Yutaka Fujino, Yuki Osada +1 more | 2020-02-11 |
| 9991097 | Plasma processing apparatus | Tomohito Komatsu, Shigenori Ozaki, Yutaka Fujino | 2018-06-05 |