Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Yuki Osada, Jun NAKAGOMI | 2022-02-08 |
| 6736945 | Wafer plating apparatus | Hirofumi Ishida | 2004-05-18 |
| 6634370 | Liquid treatment system and liquid treatment method | Satoshi Nakashima, Wataru Okase, Takenobu Matsuo, Tameyasu Hyakuzuka, Yasushi Yagi +6 more | 2003-10-21 |
| 5971696 | System for carrying-in of cassette for substrates to be processed | Tamio Endo | 1999-10-26 |
| 5048164 | Vertical heat-treatment apparatus having boat transfer mechanism | — | 1991-09-17 |