Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5971696 | System for carrying-in of cassette for substrates to be processed | Yoshiyuki Harima | 1999-10-26 |
| 5474643 | Plasma processing apparatus | Junichi Arami, Shiro Koyama, Kazuo Kikuchi, Teruaki Shiraishi, Isahiro Hasegawa +3 more | 1995-12-12 |