Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Yoichi Deguchi, Satoru Kawakami, Kenji Ishikawa | 1997-09-09 |
| 5625526 | Electrostatic chuck | Masahide Watanabe, Masami Kubota, Kenji Ishikawa, Kouichi Kazama, Mitsuaki Komino +1 more | 1997-04-29 |
| 5474643 | Plasma processing apparatus | Junichi Arami, Tamio Endo, Kazuo Kikuchi, Teruaki Shiraishi, Isahiro Hasegawa +3 more | 1995-12-12 |
| 5320704 | Plasma etching apparatus | Keiji Horioka, Yukimasa Yoshida | 1994-06-14 |
| 5236556 | Plasma apparatus | Takashi Yokota, Isahiro Hasegawa, Haruo Okano | 1993-08-17 |