Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7852059 | Power supply device | Takuya Ishii, Mikio Motomori, Kazuhito Kimura, Satoshi Wada, Yoshihisa Minami | 2010-12-14 |
| 7667377 | Laminated piezoelectric element and process for producing the same | Atsushi Yamamoto, Koichi Hayashi | 2010-02-23 |
| 7605522 | Piezoelectric device | Atsushi Yamamoto, Koichi Hayashi | 2009-10-20 |
| 7031792 | Processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Ryouichi Uemura, Kunie Ogata | 2006-04-18 |
| 6990380 | Substrate processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Ryouichi Uemura, Kunie Ogata | 2006-01-24 |
| 6969829 | Substrate processing apparatus | Masaaki Tsuruno | 2005-11-29 |
| 6837631 | Substrate processing method and substrate processing apparatus | Masayuki Nakano | 2005-01-04 |
| 6672779 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama | 2004-01-06 |
| 6670287 | Coating method and coating apparatus | Masami Akimoto | 2003-12-30 |
| 6471422 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama | 2002-10-29 |
| 6432842 | Coating method and coating apparatus | Masami Akimoto | 2002-08-13 |
| 6402401 | Substrate processing apparatus and substrate processing method | Issei Ueda, Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama | 2002-06-11 |
| 6024502 | Method and apparatus for processing substrate | Masami Akimoto | 2000-02-15 |
| 5937223 | Processing apparatus | Masami Akimoto | 1999-08-10 |
| 5923915 | Method and apparatus for processing resist | Masami Akimoto | 1999-07-13 |
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Satoru Kawakami, Shiro Koyama, Kenji Ishikawa | 1997-09-09 |
| 5542559 | Plasma treatment apparatus | Satoru Kawakami, Tsuyoshi Suzuki, Junichi Arami | 1996-08-06 |
| 5474641 | Processing method and apparatus thereof | Hayashi Otsuki | 1995-12-12 |
| 5319216 | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter | Shori Mokuo, Mitsuo Nishi, Shinji Tadakuma | 1994-06-07 |