Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5620295 | Transfer apparatus | — | 1997-04-15 |
| 5505577 | Transfer apparatus | — | 1996-04-09 |
| 5374153 | Transfer apparatus | — | 1994-12-20 |
| 5370142 | Substrate washing device | Takanori Miyazaki, Eiichi Mukai, Yuuji Kamikawa, Hiroshi Tanaka | 1994-12-06 |
| 5319216 | Substrate detector with light emitting and receiving elements arranged in staggered fashion and a polarization filter | Shori Mokuo, Yoichi Deguchi, Shinji Tadakuma | 1994-06-07 |
| 5311893 | Cleaning apparatus | — | 1994-05-17 |
| 5301700 | Washing system | Yuuji Kamikawa, Kouki Kuroda, Yoshiyuki Honda, Eiichi Mukai | 1994-04-12 |
| 5265632 | Cleaning apparatus | — | 1993-11-30 |
| 5253663 | Transfer apparatus | Hiroshi Tanaka, Ryuichi Mizoguchi, Yuuji Kamikawa | 1993-10-19 |
| 5248022 | Driving device having sealing mechanism | Yuji Kamikawa | 1993-09-28 |
| 5226437 | Washing apparatus | Yuji Kamikawa, Masafumi Inoue | 1993-07-13 |