Issued Patents All Time
Showing 1–25 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Shuichi Nagamine, Naoki Shindo | 2020-06-30 |
| 9358588 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Naoki Shindo, Takahiro Furukawa | 2016-06-07 |
| 9305818 | Substrate processing apparatus | Takafumi Tsuchiya, Koji Egashira | 2016-04-05 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Takayuki Toshima, Mitsuaki Iwashita, Mikio Nakashima | 2016-01-12 |
| 9046866 | Cleaning device and image forming apparatus | Koichi Sato, Kazuyoshi Hagiwara, Kazutoshi Sugitani, Kuniaki Tanaka, Koji Deguchi +2 more | 2015-06-02 |
| 9004079 | Substrate processing apparatus | — | 2015-04-14 |
| 9003674 | Evaporator, evaporation method and substrate processing apparatus | Mikio Nakashima | 2015-04-14 |
| 8944078 | Substrate processing apparatus, substrate processing method and storage medium | — | 2015-02-03 |
| 8851819 | Substrate processing apparatus | Takafumi Tsuchiya, Koji Egashira | 2014-10-07 |
| 8744302 | Cleaning device, image forming apparatus, and transfer unit including pressing unit | Kaoru Matsushita, Kazuyoshi Hagiwara, Kazutoshi Sugitani, Kuniaki Tanaka, Koichi Sato +2 more | 2014-06-03 |
| 8577502 | Liquid processing apparatus, liquid processing method, computer program, and storage medium | Hiroshi Tanaka, Hironobu Hyakutake | 2013-11-05 |
| 8567089 | Evaporator, evaporation method and substrate processing apparatus | Mikio Nakashima | 2013-10-29 |
| 8567417 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Hiroaki Inadomi, Hideyuki Yamamoto, Hiroshi Komiya, Koji Egashira | 2013-10-29 |
| 8491726 | Liquid processing apparatus and process liquid supplying method | Shigenori Kitahara | 2013-07-23 |
| 8371318 | Liquid processing apparatus, liquid processing method, and storage medium | Teruomi Minami, Norihiro Ito | 2013-02-12 |
| 8347901 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Naoki Shindo, Takahiro Furukawa | 2013-01-08 |
| 8303724 | Substrate processing method and non-transitory storage medium for carrying out such method | Koukichi Hiroshiro, Takayuki Toshima, Naoki Shindo | 2012-11-06 |
| 8281498 | Evaporator, evaporation method and substrate processing apparatus | Mikio Nakashima | 2012-10-09 |
| 8268087 | Liquid processing apparatus, liquid processing method, and storage medium | Norihiro Ito, Jiro Higashijima | 2012-09-18 |
| 8201567 | Liquid treating apparatus | — | 2012-06-19 |
| 8152928 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Naoki Shindo, Koukichi Hiroshiro | 2012-04-10 |
| 8015984 | Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent | Koukichi Hiroshiro, Takayuki Toshima, Naoki Shindo | 2011-09-13 |
| 8002511 | Batch forming apparatus, substrate processing system, batch forming method, and storage medium | Koji Egashira | 2011-08-23 |
| 7972468 | Semiconductor device fabricating system | Masahiro Noda | 2011-07-05 |
| 7637029 | Vapor drying method, apparatus and recording medium for use in the method | Kazuhiko Kobayashi, Nobutaka Kuroda, Mikio Nakashima, Osamu Tsuda | 2009-12-29 |