Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322373 | Liquid processing apparatus | Terufumi Wakiyama | 2022-05-03 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Jiro Higashijima, Nobuhiro Ogata, Takahisa Otsuka, Yuichi Douki, Yusuke Hashimoto +2 more | 2021-06-01 |
| 10947194 | Method for producing dihydroxyindoles | Masayoshi Nakamoto | 2021-03-16 |
| 10947195 | Production method for dihydroxyindoles | Masayoshi Nakamoto | 2021-03-16 |
| 10712602 | Optical drive | Kazuki KITAMURA, Hiroshi Fukushima, Hirofumi Kubota, Masuyuki Ota | 2020-07-14 |
| 10580669 | Substrate processing apparatus and nozzle | Tsuyoshi Fukushima, Kazuhiro Aiura | 2020-03-03 |
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Nobuhiro Ogata, Jiro Higashijima, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10460962 | Substrate processing apparatus | Terufumi Wakiyama | 2019-10-29 |
| 10297473 | Liquid processing apparatus | Terufumi Wakiyama, Jiro Higashijima | 2019-05-21 |
| 10276425 | Substrate processing system | Terufumi Wakiyama, Jiro Higashijima, Satoshi Biwa | 2019-04-30 |
| 9953848 | Substrate liquid processing apparatus | Terufumi Wakiyama, Jiro Higashijima | 2018-04-24 |
| 9852933 | Substrate processing apparatus, substrate processing method, and recording medium | — | 2017-12-26 |
| 9773687 | Liquid processing apparatus | Terufumi Wakiyama, Jiro Higashijima | 2017-09-26 |
| 9768010 | Liquid treatment apparatus | Kazuhiro Aiura, Naoki Shindo, Yosuke Hachiya | 2017-09-19 |
| 9768039 | Substrate processing apparatus | Kazuhiro Aiura, Hidetoshi Nakao, Kazuyoshi Shinohara, Satoru Tanaka, Yuki Yoshida +1 more | 2017-09-19 |
| 9711380 | Liquid processing apparatus, liquid processing method and storage medium | Takashi Nagai | 2017-07-18 |
| 9691602 | Liquid process apparatus and liquid process method | Kazuhiro Aiura, Naoki Shindo, Yosuke Hachiya, Takashi Nagai | 2017-06-27 |
| 9640383 | Liquid treatment apparatus and liquid treatment method | Kazuhiro Aiura, Takashi Nagai | 2017-05-02 |
| 9614188 | Organic electroluminescent element and lighting device | Takashi ANJIKI | 2017-04-04 |
| 9478445 | Substrate liquid processing apparatus and method for detecting abnormality of air flow | — | 2016-10-25 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Yosuke Hachiya, Jun Nogami, Kotaro Ooishi, Itaru Kanno | 2016-06-28 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Nobuhiro Ogata, Shuichi Nagamine | 2016-05-31 |
| 9177838 | Liquid process apparatus and liquid process method | Kazuhiro Aiura, Naoki Shindo, Yosuke Hachiya, Takashi Nagai | 2015-11-03 |
| 9012902 | Organic electroluminescent element | Nobuhiro Ide, Hiroya Tsuji, Yuko SUZUKA | 2015-04-21 |
| 8950414 | Liquid processing apparatus, liquid processing method, and storage medium | — | 2015-02-10 |