Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12269052 | Substrate liquid processing apparatus and liquid discharge evaluation method | Yuichi Douki, Akinori Tanaka, Minoru Tashiro, Reo Kitayama, Shu Yamamoto | 2025-04-08 |
| 11322373 | Liquid processing apparatus | Norihiro Ito | 2022-05-03 |
| 10460962 | Substrate processing apparatus | Norihiro Ito | 2019-10-29 |
| 10297473 | Liquid processing apparatus | Norihiro Ito, Jiro Higashijima | 2019-05-21 |
| 10276425 | Substrate processing system | Norihiro Ito, Jiro Higashijima, Satoshi Biwa | 2019-04-30 |
| 9953848 | Substrate liquid processing apparatus | Norihiro Ito, Jiro Higashijima | 2018-04-24 |
| 9773687 | Liquid processing apparatus | Norihiro Ito, Jiro Higashijima | 2017-09-26 |
| 9387520 | Liquid processing apparatus and cleaning method | Nobuhiro Ogata, Yoshihiro Kai, Ryouga Kamo, Yoshinori Ikeda | 2016-07-12 |
| 9108231 | Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein | Nobuhiro Ogata | 2015-08-18 |
| 8845815 | Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein | Nobuhiro Ogata | 2014-09-30 |