Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424459 | Substrate processing apparatus and substrate processing method | Hiroki Sakurai, Yenrui HSU, Shoki MIZUGUCHI, Shinichi Umeno, Kazuya Goda +2 more | 2025-09-23 |
| 12148632 | Substrate processing apparatus and cleaning method of mist guard | Yusuke Hashimoto, Daisuke Goto, Kanta Mori, Jiro Higashijima | 2024-11-19 |
| 12051605 | Substrate processing apparatus | Hiroki Sakurai, Daisuke Goto, Takahiro Koga, Kanta Mori, Yusuke Hashimoto | 2024-07-30 |
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Daisuke Goto, Kanta Mori, Kenji Yada, Yusuke Hashimoto +2 more | 2024-06-11 |
| 11880213 | Substrate liquid processing apparatus and substrate liquid processing method | Mikio Nakashima, Akinori Tanaka, Isamu Miyamoto | 2024-01-23 |
| 11712710 | Substrate processing apparatus and substrate processing method | Fumihiro Kamimura, Takahisa Otsuka, Hiroshi Komiya | 2023-08-01 |
| 11574827 | Substrate processing apparatus and substrate processing method | Tadashi Iino, Yoshihiro Kai, Yoichi Tokunaga, Jiro Higashijima | 2023-02-07 |
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Hisashi MORITA, Yusuke Takamatsu +1 more | 2021-10-26 |
| 11056335 | Substrate processing apparatus | Jiro Higashijima, Yusuke Hashimoto | 2021-07-06 |
| 11024518 | Substrate processing apparatus, substrate processing method and recording medium | Norihiro Ito, Jiro Higashijima, Takahisa Otsuka, Yuichi Douki, Yusuke Hashimoto +2 more | 2021-06-01 |
| 10486208 | Substrate processing apparatus, method of cleaning substrate processing apparatus, and storage medium | Norihiro Ito, Jiro Higashijima, Yusuke Hashimoto, Kazuhiro Aiura | 2019-11-26 |
| 10475671 | Substrate processing apparatus and method of cleaning substrate processing apparatus | Jiro Higashijima, Yusuke Hashimoto | 2019-11-12 |
| 9933702 | Substrate processing apparatus | Jiro Higashijima | 2018-04-03 |
| 9721813 | Liquid processing apparatus with cleaning jig | Hiromi Kiyose, Hidetsugu Yano, Tsukasa Hirayama | 2017-08-01 |
| 9484230 | Substrate liquid processing apparatus | Shuichi Nagamine | 2016-11-01 |
| 9387520 | Liquid processing apparatus and cleaning method | Terufumi Wakiyama, Yoshihiro Kai, Ryouga Kamo, Yoshinori Ikeda | 2016-07-12 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Norihiro Ito, Shuichi Nagamine | 2016-05-31 |
| 9305767 | Liquid processing apparatus, liquid processing method and storage medium | Kenji Nishi, Kazuhiro Takeshita, Satoru Tanaka, Shogo Mizota | 2016-04-05 |
| 9108228 | Liquid processing apparatus having switchable nozzles | Takahisa Otsuka, Hirotaka Maruyama, Kazuyuki Kudo | 2015-08-18 |
| 9108231 | Liquid processing apparatus, liquid processing method, and computer-readable recording medium having program stored therein | Terufumi Wakiyama | 2015-08-18 |
| 9073103 | Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method | Satoshi Morita, Shuichi Nagamine, Kenji Kiyota | 2015-07-07 |
| 9048269 | Substrate liquid treatment apparatus with lift pin plate | Jiro Higashijima, Satoshi Kaneko, Shuichi Nagamine, Yoshihiro Kai | 2015-06-02 |
| 9022045 | Substrate liquid cleaning apparatus with controlled liquid port ejection angle | Jiro Higashijima, Satoshi Kaneko, Shuichi Nagamine, Yoshihiro Kai | 2015-05-05 |
| 8881751 | Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus | Shuichi Nagamine | 2014-11-11 |
| 8869811 | Liquid processing apparatus and liquid processing method | Shuichi Nagamine | 2014-10-28 |