Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10700166 | Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus | Yoshihiro Kai, Shinya Ishikawa, Yuji Kamikawa, Naoki Shindo | 2020-06-30 |
| 9484230 | Substrate liquid processing apparatus | Nobuhiro Ogata | 2016-11-01 |
| 9355871 | Substrate liquid processing apparatus for separating processing solution and atmosphere from each other within collection cup | Jiro Higashijima, Norihiro Ito, Nobuhiro Ogata | 2016-05-31 |
| 9346084 | Liquid processing apparatus and liquid processing method | Yusuke Hashimoto | 2016-05-24 |
| 9275881 | Liquid processing apparatus, liquid processing method, and storage medium | Yusuke Hashimoto | 2016-03-01 |
| 9266153 | Substrate processing apparatus and substrate processing method | Yusuke Hashimoto | 2016-02-23 |
| 9073103 | Liquid processing apparatus, liquid processing method, and recording medium having computer program for performing the same method | Satoshi Morita, Nobuhiro Ogata, Kenji Kiyota | 2015-07-07 |
| 9048269 | Substrate liquid treatment apparatus with lift pin plate | Jiro Higashijima, Nobuhiro Ogata, Satoshi Kaneko, Yoshihiro Kai | 2015-06-02 |
| 9022045 | Substrate liquid cleaning apparatus with controlled liquid port ejection angle | Jiro Higashijima, Nobuhiro Ogata, Satoshi Kaneko, Yoshihiro Kai | 2015-05-05 |
| 8881751 | Substrate liquid processing apparatus, method of controlling substrate liquid processing apparatus, and storage medium performing substrate liquid processing apparatus control method on substrate liquid processing apparatus | Nobuhiro Ogata | 2014-11-11 |
| 8869811 | Liquid processing apparatus and liquid processing method | Nobuhiro Ogata | 2014-10-28 |
| 8840752 | Flow passage switching apparatus, processing apparatus, flow passage switching method, processing method and storage medium | Nobuhiro Ogata, Kenji Kiyota | 2014-09-23 |
| 8671875 | Liquid processing apparatus, liquid processing method and storage medium | Naofumi Kishita, Satoshi Biwa, Kouji Fujimura | 2014-03-18 |
| 8539906 | Substrate liquid processing apparatus | Nobuhiro Ogata | 2013-09-24 |
| 7665918 | Developing apparatus, developing method and storage medium | Taro Yamamoto, Hirofumi Takeguchi | 2010-02-23 |
| D610176 | Coater cup | Naofumi Kishita, Koji Takayanagi, Yuichiro MIYATA, Yasushi Takiguchi | 2010-02-16 |
| 6843259 | Solution treatment unit | — | 2005-01-18 |
| 6730599 | Film forming method and film forming apparatus | Hiroichi Inada | 2004-05-04 |
| 6715943 | Solution treatment method and solution treatment unit | — | 2004-04-06 |
| 6602382 | Solution processing apparatus | Yuji Matsuyama | 2003-08-05 |
| 6541376 | Film forming method and film forming apparatus | Hiroichi Inada | 2003-04-01 |
| 6533864 | Solution processing apparatus and method | Yuji Matsuyama | 2003-03-18 |
| 6514570 | Solution processing apparatus and method | Yuji Matsuyama | 2003-02-04 |
| 6384894 | Developing method and developing unit | Yuji Matsuyama | 2002-05-07 |
| 6364547 | Solution processing apparatus | Yuji Matsuyama | 2002-04-02 |