Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10643872 | Liquid processing apparatus, liquid processing method, and storage medium | Masahiro Abe, Hiroichi Inada, Tohru Azuma, Tsunenaga Nakashima, Hideki Kajiwara | 2020-05-05 |
| 9899244 | Liquid processing apparatus, liquid processing method, and storage medium | — | 2018-02-20 |
| 9620394 | Liquid treatment apparatus | Yuji Sakai | 2017-04-11 |
| 9082614 | Periphery coating apparatus, periphery coating method and storage medium therefor | Shinichi Hatakeyama, Yoshitomo Sato, Kazuyuki Tashiro | 2015-07-14 |
| 9027508 | Periphery coating apparatus, periphery coating method and storage medium therefor | Shinichi Hatakeyama, Yoshitomo Sato, Kazuyuki Tashiro | 2015-05-12 |
| 8722152 | Wet processing apparatus, wet processing method and storage medium | Kouji Fujimura, Yoshitaka Hara | 2014-05-13 |
| 8671875 | Liquid processing apparatus, liquid processing method and storage medium | Shuichi Nagamine, Satoshi Biwa, Kouji Fujimura | 2014-03-18 |
| 8522714 | Wet processing apparatus, wet processing method and storage medium | Kouji Fujimura, Yoshitaka Hara | 2013-09-03 |
| 8375887 | Solution treatment apparatus, solution treatment method and resist coating method | Koji Takayanagi | 2013-02-19 |
| 8354141 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Tsunenaga Nakashima, Gouichi Iwao, Nobuhiro Ogata | 2013-01-15 |
| 7984690 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Tsunenaga Nakashima, Gouichi Iwao, Nobuhiro Ogata | 2011-07-26 |
| D610176 | Coater cup | Shuichi Nagamine, Koji Takayanagi, Yuichiro MIYATA, Yasushi Takiguchi | 2010-02-16 |
| 7344600 | Substrate treatment apparatus | Hiroichi Inada | 2008-03-18 |