Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398461 | Substrate cleaning apparatus and substrate cleaning method | Masami Akimoto | 2025-08-26 |
| 12131919 | Substrate cleaning apparatus and substrate cleaning method | Masami Akimoto | 2024-10-29 |
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2024-01-09 |
| 11630392 | Substrate processing apparatus | — | 2023-04-18 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Katsunori Ichino, Hideo Funakoshi, Nobuaki Matsuoka, Masayuki Kajiwara | 2020-10-20 |
| 10643872 | Liquid processing apparatus, liquid processing method, and storage medium | Masahiro Abe, Hiroichi Inada, Tohru Azuma, Naofumi Kishita, Hideki Kajiwara | 2020-05-05 |
| 9984904 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2018-05-29 |
| 9984905 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2018-05-29 |
| 9460942 | Substrate treatment system, substrate transfer method and computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2016-10-04 |
| 9287145 | Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium | Masahiro Nakaharada, Yoji Sakata, Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2016-03-15 |
| D690330 | Coating and developing apparatus | Masashi Tsuchiyama, Shinichi Hayashi | 2013-09-24 |
| 8511331 | Process liquid feed mechanism | Shunsuke Shiraishi, Toshihide Takeo | 2013-08-20 |
| 8469285 | Chemical liquid supply nozzle and chemical liquid supply method | Shinichi Hayashi, Akihiro Fujimoto, Takahiro Ookubo | 2013-06-25 |
| 8354141 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Gouichi Iwao, Naofumi Kishita, Nobuhiro Ogata | 2013-01-15 |
| 8236378 | Wet processing system, wet processing method and storage medium | Michio Kinoshita, Kousuke Nakamichi | 2012-08-07 |
| 7984690 | Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium | Gouichi Iwao, Naofumi Kishita, Nobuhiro Ogata | 2011-07-26 |
| 7752999 | Wet processing system, wet processing method and storage medium | Michio Kinoshita, Kousuke Nakamichi | 2010-07-13 |
| 7736498 | Solution treatment apparatus and solution treatment method | Nobuaki Matsuoka, Shinichi Hayashi, Akira Oozono | 2010-06-15 |
| 7640885 | Liquid processing method and liquid processing apparatus | Kenji Urata, Shinji Okada, Nobuaki Matsuoka | 2010-01-05 |
| 7547614 | Solution treatment apparatus and solution treatment method | Nobuaki Matsuoka, Shinichi Hayashi, Akira Oozono | 2009-06-16 |
| 7287920 | Semiconductor manufacturing apparatus and method | Shinichi Hayashi, Suguru Enokida, Masami Akimoto, Nobuaki Matsuoka | 2007-10-30 |