Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094737 | Substrate processing apparatus, control method, and computer-readable storage medium | Masayuki Kajiwara, Daisuke Ishimaru, Takuya Tajiri, Atsushi Yamamoto, Masato Imamura +5 more | 2024-09-17 |
| 11587805 | Substrate processing apparatus and substrate processing method | Tomoki Okazawa, Masanobu Watanabe | 2023-02-21 |
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Tsunenaga Nakashima, Hideo Funakoshi, Nobuaki Matsuoka, Masayuki Kajiwara | 2020-10-20 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Wallace P. Printz, Joshua Hooge, Yuichi Terashita, Kousuke Yoshihara | 2019-04-16 |
| 10201826 | Liquid coating method, liquid coating apparatus, and computer-readable storage medium | Takayuki Ishii, Kouzou Kawahara, Daisuke Simokawa, Kazuyuki Tashiro | 2019-02-12 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-07-17 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2018-01-30 |
| 9731226 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya, Yuichi Terashita +1 more | 2017-08-15 |
| 9613836 | Coating film forming apparatus, coating film forming method, and recording medium | Kousuke Yoshihara, Yuichi Terashita | 2017-04-04 |
| 9165763 | Coating treatment method | Koji Takayanagi, Tomohiro Noda | 2015-10-20 |
| 8691336 | Coating treatment method, non-transitory computer storage medium and coating treatment apparatus | Kousuke Yoshihara | 2014-04-08 |
| 8501274 | Coating treatment method, computer storage medium, and coating treatment apparatus | Koji Takayanagi, Tomohiro Noda | 2013-08-06 |
| 8304018 | Coating method | Koji Takayanagi, Tomohiro Iseki, Kousuke Yoshihara | 2012-11-06 |